Line Width Control on Laser Beam Writing. (2nd Report). Line Width Control by Defocusing.
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چکیده
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ژورنال
عنوان ژورنال: Journal of the Japan Society for Precision Engineering
سال: 1999
ISSN: 1882-675X,0912-0289
DOI: 10.2493/jjspe.65.1158